TOUCH TRIGGER PROBE MEASUREMENT ACCURACY OF ASPHERICAL MIRROR DURING fine lapping PROCESS Based on t

中文解释

精研磨阶段非球面面形接触式测量误差补偿技术在分析双面研磨加工运动原理的基础上，提出了微晶玻璃基板的具体研磨加工过程，即粗磨及精磨过程。

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